CENTER FOR PLASMA-AIDED MANUFACTURING

The objectives of this department is to enhance both the knowledge- and technology-base for plasma-induced gas phase and surface modification/deposition of materials.This involves fundamental research for understanding the mechanisms of plasma-mediated chemical and physical processes, the creation of novel materials and material surfaces for advencad technologies, and the transfer of plasma-aided technologies to industrial applications.

Presntly pursued Specific Research Directions of PECVD&F group, include:

• Development of plasma-mediated, surface modification of organic and inorganic polymeric substrates for generating controlled etching reactions (e.g. plasma-mediated chemical etching Ni and Fe nad various polymer surfaces), creating specific surface topographies, and implanting specific functionalities onto various substrate surfaces.

• Deposition of novel and conventional macromolecular layers (e.g. Teflon-like thin layers and IR transparent films) on inorganic and organic surfaces by involving plasma-state and plasma-induced reaction mechanisms, including template polymerization reaction mechanisms initiated from surfaces with plasma-enhanced crystallynity.

• Investigation of the influence of plasma parameters (electron energy distribution, power, frequency, pressure, etc.) on the discharge-induced gas phase molecular fragmentation and surface-mediated plasma-chemistry mechanisms (Figure 1).
  
  

  

• Kinetic modeling of plasma-induced gas phase fragmentation and gas phase and surface-mediated recombination processes (e.g. Kinetic modeling of ammonia and hydrazine-RF plasma environments).

• Generation of intelligent substrates for molecular recognition and molecular machining processes by immobilizing and synthesizing active biomolecules (e.g. enzymes, oligonucleotides) on plasma-functionalized substrate surfaces (Figure 2).
  
  

  

• Evaluation of the influence of the amorphous and stereoregular nature of the polymeric substrates and the chemical nature and length of spacer molecules on the activities of the immobilized biomolecules.

• Development of novel plasma installations for specific plasma treatments, and for scaling up laboratory technologies to industrial applications (Figure 3).

Collaboration with other research groups:

Back to Description of Plasma Research Areas

CPAM Homepage