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DEPARTMENT OF THIN LAYER DEPOSITION

DEPARTMENT OF THIN LAYER DEPOSITION

CENTER FOR PLASMA-AIDED MANUFACTURING

 

The objectives of this department is to enhance both the knowledge- and technology-base for plasma-induced gas phase and surface modification/deposition of materials.This involves fundamental research for understanding the mechanisms of plasma-mediated chemical and physical processes, the creation of novel materials and material surfaces for advencad technologies, and the transfer of plasma-aided technologies to industrial applications.

Presntly pursued Specific Research Directions of PECVD&F group, include:

 

Collaboration with other research groups:

University of Texas at Arlington, TX;

University of Ulm, Germany;

Concordia University-Montreal, Canada;

University of Guadalajara, Mexico;

Gifu Pharmaceutical University, Japan;

Chalmers University of Technology, Goteborg, Sweden;

Cymer Inc. San Diego, CA;

Seagate, Minneapolis, MN;

Amersham Pharmacia Biotech Milwaukee, WI;

Grain Processing Corporation, Muscatine, IA;

 

 

 


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