C-PAM Fall 2000 Seminar Series

 

September

 

8          Marlann Patterson, University of Wisconsin-Madison, Center for Plasma-Aided Manufacturing, Antenna Configurations for Large Area rf Inductive Plasma Sources

 

15        Yansheng Men, University of Wisconsin-Madison, Center for Plasma-Aided Manufacturing, The CFx Radical and Etch Product Concentrations in Fluorocarbon Plasmas from Tunable Infrared Diode Laser Spectroscopy

 

22*       William Lenling, Thermal Spray Technologies, Surface Coating Using Thermal Spray Process

 

29        Dr. Bon-Woong Koo, Varian Semiconductor Equipment Associates, Plasma Characterization of a Plasma Doping System for Semiconductor Device Fabrication

 

October

 

13*      Erik Wilson, University of Wisconsin-Madison, Center for Plasma-Aided Manufacturing, Plasma Source Ion Implantation Technology for Engineering Surfaces of Materials

 

20*      Dr. John Woodford, Argonne National Laboratory, Ultra Low Friction Diamond-like Carbon Films Research at Argonne National Laboratory

 

November

 

3          Matt Blain, Sandia National Laboratories, Design, Fabrication, and Operation of a High-Resolution Submicron Retarding Field Energy Analyzer for Process Plasma Analysis

 

10        Barbara Abraham-Shrauner, Washington University-St. Louis, Etching, Sidewall Passivation, and Microtrenching in Contact holes and Edge Regions

 

14        Deepak Gupta, CPAT, Institute for Plasma-Research-India, Effects of Dust Particles on Electrical Corona Discharge

 

17        Darrin Leonhardt, Plasma Physics Division, U.S. Naval Research Laboratory, Large Area Plasma Processing System Based on Electron Beam Ionization

 

 

 

 

December

 

8          Lawrence Overzet, Plasma Application Laboratory, University of Texas-Dallas, An Inductively Coupled Plasma Source:  Design and Characterization

 

           

The Seminar Series is available on videotape and a complete listing is available at our website (http://cpam.engr.wisc.edu/).  For information, please contact the C-PAM office at (608) 263-4970.

 

 

C-PAM Spring 2001 Seminar Series

 

 

January

 

26        Prof. Karen Gleason, Dept. of Chemical Engineering, MIT, Pulsing or Eliminating the Plasma Enhancement of Chemically Vapor Deposited Organic Thin Films

 

February

 

2          G.D. Severn, Dept. of Physics, University of San Diego, Diode Lasers for Laser-Induced Fluorescence Diagnosis of Distribution Functions and Transport Coefficients in ArII Plasmas

 

9          Silvia Alvarez-Blanco, University of Wisconsin-Madison, Center for Plasma-Aided Manufacturing, Thin Polyaniline Layers Produced by Horseradish Peroxidase Immobilized on RF-Plasma Functionalized Polyethylene Surfaces

 

16        Hyuk Yu, University of Wisconsin-Madison, Dept. of Chemistry, Plasma-Aided Surace Modification of Commodity Polymers for Biocompatibility

 

23        Jeff Hopwood, Northeastern University, ECE Dept., Plasma-on-a-chip:  Microfabricated Plasma Generators

 

March

 

9*        Kumar Sridharan, University of Wisconsin-Madison, Center for Plasma-Aided Manufacturing, Dept. of Engineering Physics, Surface Engineering of Materials by Plasma-based Ion Implantation & Film Deposition

 

23        Shahid Rauf, Motorola Semiconductor Products Sector, Modeling of the Bosch Deep Si Etch Process

 

30        John Curry, University of Wisconsin-Madison, Physics Dept., High Intensity Discharge Lamps and X-ray Diagnostics:  Probing Low-temperature Plasmas with High Energy Photons

 

April

 

20        Joseph Cecchi, University of New Mexico, Time-Resolved Fluorocarbon Radical Concentrations and Temperatures During Pulsed Oxide Etching Plasmas

 

27        Dr. Alexander Piel, Christian-Albrechts University, Kiel, Germany, Institute for Experimental and Applied Physics, Waves and Oscillations in Dusty Plasmas

 

May

 

4          Carolyn Aita, University of Wisconsin-Milwaukee, Advanced Coatings Experimental Laboratory, Nanostructured Ceramics for Multifunctional Coatings

 

 

The Seminar Series is available on videotape and a complete listing is available at our website (http://cpam.engr.wisc.edu/).  For information, please contact the C-PAM office at (608) 263-4970.